Subsystem Architect - Stages EUV (f/m/x)

zeissgroup· Carl Zeiss SMT GmbH
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📍 Jena📍 OberkochenFull time

About this role

ZEISS Semiconductor Manufacturing Technology​

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Enabler for smaller, more powerful, and more energy-efficient microchips​

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Working for tomorrow today. ​

Around 80 percent of all microchips worldwide are produced using ZEISS technologies. As the centerpiece of every electronically controlled system, they have become an integral part of our everyday lives – whether in smartphones, smart homes or smart factories. ZEISS is a technology leader in the field of semiconductor manufacturing equipment. With high-precision lithography optics, photomask systems and process control solutions, ZEISS enables the production of ever smaller, increasingly powerful, and more energy-efficient microchips, and thus plays a pivotal role in the age of micro- and nanoelectronics.


As a Sub-Function Architect for EUV Stages (f/m/x), you will be responsible for the technical architecture of a sub-function within highly precise stage systems for EUV technology. You will bring together requirements, interfaces, and various engineering disciplines into a consistent overall solution and support the sub-function from initial concept through integration and verification.


Your Role


  • Develop and take responsibility for the technical architecture of the sub-function
  • Derive and align system, functional, and interface requirements
  • Develop technical solution concepts for complex subsystems
  • Coordinate interfaces between mechanics, electronics, software, and control engineering
  • Plan, coordinate, and technically lead development work packages
  • Identify technical risks and initiate appropriate mitigation measures
  • Evaluate development and test results and prepare technical decisions
  • Develop and support test, integration, and verification concepts
  • Technically manage suppliers and external development partners
  • Provide technical guidance to development teams and act as a technical point of contact
  • Collaborate across locations in interdisciplinary teams in Jena and Oberkochen

Your Profile


  • Successfully completed Master’s degree in engineering or natural sciences; a PhD is an advantage
  • Several years of experience in the development of complex mechatronic systems
  • Strong knowledge of system architecture, precision mechanics, or control engineering
  • Experience in requirements, architecture, and interface management
  • Strong systems thinking and a good understanding of technical interdependencies
  • Experience in the technical leadership of interdisciplinary development activities
  • Self-motivated, responsible, and capable of making decisions
  • Clear communication skills and a collaborative, structured approach to work
  • Very good command of German and English, both written and spoken
  • Willingness to travel for project-related assignments

Your ZEISS Recruiting Team:

Janina Kalmbach

Frequently Asked Questions

Is the salary disclosed for the Subsystem Architect - Stages EUV (f/m/x) position at zeissgroup?
The salary for this Subsystem Architect - Stages EUV (f/m/x) role at zeissgroup is not publicly listed. Click "Apply Now" to learn more about the compensation package on their official careers page.
Where is the Subsystem Architect - Stages EUV (f/m/x) position at zeissgroup located?
This Subsystem Architect - Stages EUV (f/m/x) role at zeissgroup is based in Jena, Oberkochen. The position is listed as on-site or hybrid. Check the full job description or apply directly to confirm the work arrangement.
Is the Subsystem Architect - Stages EUV (f/m/x) role at zeissgroup full-time or part-time?
This is listed as a Full time position. It is posted as a Subsystem Architect - Stages EUV (f/m/x) role in the Carl Zeiss SMT GmbH department at zeissgroup.
Which team or department does the Subsystem Architect - Stages EUV (f/m/x) at zeissgroup belong to?
This Subsystem Architect - Stages EUV (f/m/x) position is part of the Carl Zeiss SMT GmbH department at zeissgroup. See the full job description for more information about the team structure and responsibilities.
How do I apply for the Subsystem Architect - Stages EUV (f/m/x) position at zeissgroup?
Click the "Apply Now" button on this page. You will be redirected to zeissgroup's official application portal hosted on workday where you can submit your application directly.
When was the Subsystem Architect - Stages EUV (f/m/x) job at zeissgroup posted?
This Subsystem Architect - Stages EUV (f/m/x) position at zeissgroup was posted on Sep 22, 2026. Apply as soon as possible — early applications are often reviewed first.
Subsystem Architect - Stages EUV (f/m/x)
zeissgroup
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